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Tel Number
181-3719-5600
Product Introduction:
The KJ-TPECVD1100-S80CK3 tube PECVD system utilizes microwave or radio frequency to ionize gas containing atoms composed of thin films, forming a plasma locally. The plasma has strong chemical activity and is prone to reactions, depositing the desired thin film on the substrate. The system is mainly used in metal powder coating and can rotate and tilt. The KJ-TPECVD1100-S80CK3 tube PECVD system belongs to one of the pecvd systems.
Analytical diagram of automatic rotating inclined tube PECVD system
Realistic view of automatic rotating inclined tube PECVD system
1. Good air tightness
The 1200 ℃ tube PECVD system adopts an O-ring compression seal between the furnace tube and the flange, which is easy to remove and can be repeatedly removed. It has good airtightness and magnetic fluid sealing, ensuring that vacuum can be extracted during the rotation process.
2. Temperature field equilibrium
Adopting polycrystalline fiber furnace material, the material has good insulation performance, high reflectivity, and a balanced temperature field.
3. Rotatable and tilted
The 1200 ℃ tube PECVD system mainly adopts J-T1200 rotary tube furnace, which can tilt and rotate 360 degrees, with a speed of 0-15 revolutions (adjustable speed); The inclination angle is 0-15 ° (adjustable) for easy feeding and discharging, and a lifting plate is installed in the pipeline to evenly heat the material in the furnace.
4.Temperature control protection
Equipped with ultra mild couple breaking protection function.
| Product name | Automatic Rotary Tilt Tube PECVD System (CE Cert) |
| Rotary Tube Furnace Part | |
| Model | KJ-TPECVD1100-S80CK3 |
| Heating zone length | 660mm（220+220+220mm Three temperature zone） |
| Constant temperature zone length | 400mm |
| Furnace tube material | High-purity quartz tube (reducing tube) |
| Furnace tube size |
Reducer Dimensions at both ends OD: 80mm* 400mm Middle size OD: 150mm* 400mm The total length is 1200mm, the middle part of the furnace tube is welded with the lifting plate |
| Working temperature | ≦1100℃ |
| Max.temperature | 1200℃ |
| Temperature measuring element | 3 K-type thermocouples for temperature control |
| Temperature Control System | 7-inch touch screen display, 16-segment storable curves, 30-segment PID microcomputer programmable automatic control, can store and copy data |
| Insulation temperature control accuracy | ±1℃ |
| temperature protection | With over temperature and burnout protection function |
| Heating rate | 0-20ºC/min |
| Heating element | Alloy resistance wire |
| Operating Voltage | AC 220V single-phase 50HZ |
| Maximum power | 5KW（subject to actual power ) |
| Furnace chamber material | Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field |
| sealing system | The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness. |
| Flange | Water-cooled sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials |
| inclined structure | Can be tilted with an inclination angle of 0-15° (adjustable inclination angle) to facilitate material in and out |
| rotating structure |
Can rotate 360 degrees, speed 0-15 revolutions (speed adjustable) The material is evenly heated in the furnace |
| Furnace shell temperature | ≤45℃ |
| vacuum system part | |
| Name | Molecular pump set |
| pump set | Rotary vane pump + molecular pump |
| The main parameters | The ultimate vacuum is 6.7*10-3Pa (including KF25 interface, vacuum baffle valve and movable box) |
| vacuum display | Imported capacitive diaphragm vacuum gauge, corrosion-resistant, real-time display of vacuum degree |
| Vacuum display range | Its measuring range is 1×105--1×10-5pa |
| rotary seal | Magnetic fluid seal to ensure that vacuum can be pumped during rotation |
| Air system part | |
| Name | Three-way mass flow meter |
| Gas line | Three-way |
| flow control | LCD touch screen control, digital display, each gas contains separate needle valve control, automatic gas flow control |
| Air inlet and outlet | Three in and one out, built-in precision mixing tank |
| link method | Double Ferrule Fitting |
| flow range | MFC1-MFC3: 0-10SLM (range optional) |
| control precision | About ±1.5%F.S, different ranges, slightly different |
| maximum withstand voltage | 1.1Mpa |
| Working temperature | 5℃-45℃ |
| Plasma radio frequency part | |
| Name | RF automatic matcher |
| Model | VERG-500+VENA-500 |
| Matching power range | 0-500W |
| working frequency | 13.56MHZ+0.005% |
| Normal working reflected power | ＜3W |
| match time | ＜3S |
| transmission efficiency | ＞90% |
| Use stability | ±1%F.S |
| Matching power supply | AC220V/50-60HZ |
| input connector | N type |
| output connector | |
| control mode | Manual / Auto |
| Preset points can be set | 7 |
| Matching Impedance Range | Real part 0-80Ω Imaginary part-j200-j200 (impedance can be adjusted according to load) |
| Matching size | 340X230X130 MM |
| Provide related accessories | 1 set of gas circuit, 1 set of radio frequency power supply, 1 set of vacuum pump group, 2 furnace plugs, 1 pair of sealing flanges, 1 piece of quartz tube, 2 pairs of sealing rings, 1 pair of high-temperature gloves, 1 piece of crucible hook, 1 piece of vacuum pump connecting pipe fittings Set, 1 hex wrench for disassembling the flange, 1 copy of warranty card manual, etc. |
Realistic view of automatic rotating inclined tube PECVD system
