1400℃ high vacuum cvd tube furnace

Features of 1400℃ high vacuum cvd tube furnace

1400 CVD tube furnace consists of vacuum tube furnace + system + gas supply system, the highest temperature can reach 1200 degrees, can be a single temperature zone, dual zone, three zone, the ultimate vacuum can reach 10-3Pa, the gas supply system is flow control can be proton flow meter or float flow meter, gas mixing channels can be mix 2 Road, 3 Road, 4 road, 5 road. The doped molybdenum alloy heating wire as a heating element PT-T1200 tube furnace with double shell structure and Yu electric temperature control instrumentation, can carry out 30 section temperature control procedures, trigger, thyristor control, furnace used Japanese imports of polycrystalline alumina fiber material, has the advantages of temperature balance, low surface temperature, energy saving etc..

Technical parameters of CVD grown graphene furnace :

Model	PT-1200 CVD grown graphene furnace
Control system	Intelligent temperature control system
Display mode	Digital tube display(LED)
Limiting  temperature	1400℃
Working temperature	≤1150℃
Heating rate	≤20℃(suggestion:10℃/min)
Heating element	Aludirome
Heating zone	Single
Heating zone length	400mm
Furnace tube material	Quartz tube
furnace tube diameter	80mm
The furnace tube length	1000mm
Gas tightness	Vacuum flange and corundum furnace tube up to4.03×10-3Pa
Control mode	PID Temperature control
Temperature accuracy	±1℃
Thermal Couple	K Type
Working voltage	AC 110-480V 50Hz～60Hz
Rated power	3KW
The flow meter	Float flowmeter
Pneumatic pressure	-0.1～0.15 MPa
Warranty	12 month (exclusive wearing part)

CVD grown graphene furnace can be customized according to customers’requirements.