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Introduction:
Continuous calcination furnace for High Purity Alumina (HPA) is a high temperature reactor with special rotary and tilt function. It is specially designed for sintering of inorganic compound, such as, mineral particles and battery material and with better uniformity. Multi heating zone, condenser and tail gas collect equipment can be optional part according to different experiment.
Technical Parameter:
Continuous calcination furnace for High Purity Alumina (HPA) is a high temperature reactor with special rotary and tilt function. It is specially designed for sintering of inorganic compound, such as, mineral particles and battery material and with better uniformity. Multi heating zone, condenser and tail gas collect equipment can be optional part according to different experiment.
Technical Parameter:
| Product name | Tubular PECVD system (CE certification) |
| Slide tube furnace part | |
| Model | KJ-T1200 |
| Heating zone length | 300mm |
| Furnace tube size | diameter 120*1600mm |
| Working temperature | ≦1100℃ |
| Max. temperature | 1200℃ |
| Temperature measuring element | K type thermocouple |
| Temperature Control System | 30-segment PID microcomputer programmable automatic control |
| Insulation temperature control accuracy | ±1℃ |
| temperature protection | With over temperature and burnout protection function |
| Heating rate | 0-20ºC/min |
| Heating element | High resistance electric heating alloy wire OCr27A17Mo |
| Operating Voltage | AC220V single phase 50HZ |
| rated power | 4KW |
| chamber material | Using polycrystalline fiber furnace material, the material has good thermal insulation performance, high reflectivity and balanced temperature field |
| sealing system | The furnace tube and the flange are squeezed and sealed with O-rings, which are easy to disassemble, can be disassembled repeatedly, and have good air tightness. |
| Furnace tube | High purity quartz tube |
| French | 304 stainless steel sealing flange, installed mechanical pressure gauge and stainless steel globe valve, easy to disassemble and take out materials |
| Furnace structure | Cr-plated thick steel plate two-way slide rails can realize the movement of the tube furnace to achieve rapid heating and cooling |
| Furnace shell temperature | ≤45℃ |
| vacuum system part | |
| name | DRV16 Rotary Vane Pump 4L/S |
| The main parameters | Ultimate vacuum degree 10Pa (including KF25 interface, vacuum baffle valve and movable box) |
| vacuum display | Resistance digital display vacuum gauge, display range standard atmospheric pressure--10-1pa |
| Air system part | |
| name | Four-way mass flow meter |
| Gas line | four way |
| flow control | Digital display, each channel of gas contains a needle valve for separate control, and the gas flow is automatically controlled |
| Air inlet and outlet | Four in and one out, built-in precision mixing tank |
| link method | Double Ferrule Fitting |
| flow range | MFC1-MFC4：0-500sccm（range optional) |
| control precision | About ±1.5%F.S, different ranges, slightly different |
| Working temperature | 5℃-45℃ |
| Plasma radio frequency part | |
| name | RF automatic matcher |
| Matching power range | 0-500W |
| working frequency | 13.56MHZ+0.005% |
| Normal working reflected power | ＜3W |
| match time | ＜3S |
| transmission efficiency | ＞90% |
| Matching power supply | AC220V/50-60HZ |
