High Vacuum Single-chamber Thermal Evaporation System

High Vacuum Single-chamber Thermal Evaporation System is a multi-source organic-inorganic thermal generation system with a single-chamber circularstructure, which is mainly used for the research of EL OEL molecular organic electroluminescent device films.

Real shot of High Vacuum Single chamber Thermal Evolution System

1. The system adopts a structure featuring single-chamber circular and front-open cover.
2. The sample stage can be applied with a mask.
3. Sample size: 100×100mm; (4X4”)
4. 2 installation ports of imported quartz crystal oscillator probe are reserved in the growth chamber;
5. The growth chamber is equipped with 2 organic beam source furnaces, 2 sets of evaporation power supply can be equipped with evaporation power supply, , and temperature control can be carried out through the imported temp. controller.
6. The growth chamber vacuum obtaining system uses domestic turbo molecular pump (600L/S) + mechanical pump (9L/S) for pumping;
7. The vacuum chamber components and equipped parts are all made of high-quality stainless-steel material, adopting the technique of argon-arc welding, and the surface treatment is made through the most advanced electrochemical polishing passivation process in China.
 

The ultimate vacuum of the growth chamber is ≤6×10-5 Pa; the pumping speed can reach 6×10-4 Pa in 40 minutes.

Real shot of High Vacuum Single chamber Thermal Evolution System

Part 1: Vacuum chamber cavity components ------------------------------------------------1 set

Vacuum chamber cavity assembly size: round vertical vacuum chamber, its size is about Φ350×H380, front door is structure with aluminum cover, vacuum chamber adopts high vacuum design, wall anti-fouling board is made of high quality stainless-steel material , argon-arc welding and surface treatment is finished through spray glass pill + chemical electropolishing passivation treatment new process.

The flange interface of various specifications is welded to the vacuum chamber assembly as follows:

Vacuum chamber cavity components

1. The flange interface of the upper head of the vacuum chamber: 1 (connected to the sample assembly);
2. CF150 flange interface: 1 (molecular pump interface);
3. CF35 flange interface: 6 (connected to high vacuum ionization gauge, film thickness gauge, side pumping, baking lighting, etc.);
4. CF16 flange interface: 4 (intake line, inflation valve, 1 spare);
5. KF16 flange interface: 1 (connected to low vacuum resistance regulation);
6. KF40 flange interface: 1 (connected to the side of the pipeline);
7. the body has an RF200 with a glass baffle observation window.
8. evaporation source baffle interface: 2 manual ones.
9. A set of manual inorganic power selector switches;
 

Part 2, Organic evaporation boat and power supply -------------------------------------2 sets

2 new evaporation sources (high and low temperature compatible source furnace), each steaming material can be loaded with 10CC (the bismuth material is quartz material);
2 sets beam source furnace power supply 500W;
The beam source furnace temperature controller adopts Japanese imported temperature controller; Temperature range is Rm-600C;
There is an electric heat shield on the upper part of the beam source furnace to prevent the evaporation boat from radiating upward;
An anti-temperature interference device is arranged between the beam source furnaces;
Beam source furnace quartz crucible: 5;
The beam source furnace adopts the design method of Luxel Radak Company of the United States;

Organic evaporation boat and power supply

Part 3, Sample mask device -------------------------------------------- -----1 set

mask: 1, the mask is replaced by manual replacement. (Customized according to customer's request)

Part 4, sample station ---------------------------------------------- ----------1 set

4.1 Substrate size: 1 piece of 100×100mm substrate; adjustable evaporation distance 250-300.
4.2 Rotationg speed； 0-30 RPM

Part 5, Vacuum background pumping and vacuum measurement -------------------1 set

5.1, composite molecular pump: FF-600 molecular pump   1 set
5.2, mechanical pump and solenoid valve: pumping speed 9L/S   1 set
5.3. Metal hose connected to molecular pump and mechanical pump  1 set
5.4, composite digital display vacuum gauge and meter    1 set
Thermocouple gauge: (KF16 quick release flange) 1.0x103Pa ---1.0x10-1Pa   1 Qty
Ionization gauge: (CF35 knife flange) 1.0x10-1Pa ---1.0x10-5Pa    1Qty
5.5, bleed valve and inflation valve: 2 for vacuum chamber release and vacuum inflation
5.6, other valves: KF40 side angle valve 1 Qty and  DN40 electromagnetic shut-off valve  1 Qty

Part 6, vacuum room lighting device -------------------------------------------- -----1 set

Part 7, domestic film thickness meter (water cooling) ---------------------------------- 1 set

Part 8 A number of leak detection ports and spare ports are reserved in the vacuum chamber . ------------------------------1 set

High Vacuum Single chamber Thermal Evolution System Operation Panel