Application scenarios of tubular PECVD

The tube PECVD (plasma enhanced chemical vapor deposition) technology has a wide range of applications in various fields due to its multiple advantages. Let’s take a detailed look below!

PECVD electric furnace with preheating (click on the image to view product details)

1. Semiconductor industry
Thin film material deposition: In the semiconductor manufacturing process, PECVD technology can be used for the deposition of various thin film materials, including but not limited to insulation layers, passivation layers, and low-k dielectric materials. These thin films have excellent electrical properties and chemical stability, which are important for improving the performance of semiconductor devices.
Insulation layer deposition: such as silicon nitride (SiN) film and silicon dioxide (SiO2) film, used to isolate and protect different parts of semiconductor devices.
Passivation layer deposition: used to protect semiconductor devices from external environmental erosion, improve device reliability and stability.
Low k dielectric material deposition: helps to reduce the capacitance effect between interconnects and improve device performance.
Optoelectronic device production: PECVD technology can also be used to prepare key components in silicon-based optoelectronic devices such as optical waveguides and gratings.

2. Manufacturing of solar cells
Thin film deposition: PECVD technology is an important deposition technique for manufacturing solar cells and photovoltaic modules. It can uniformly deposit thin films, such as anti reflective films, transparent conductive films, and other key materials, on wide surface areas such as solar panels or optical glass. By adjusting plasma parameters, the refractive quality of optical coatings can be finely controlled, thereby improving the photoelectric conversion efficiency of solar cells.

3. Optical coating
Production of coatings with specific optical properties: PECVD technology is widely used to produce coatings with specific optical properties, such as anti reflective coatings, anti reflective coatings, etc. These coatings can be used for optical products such as sunglasses, colored optical devices, and photometers to improve the optical performance and service life of the products.

4. Preparation of Nanofilm
High quality film production: Tubular PECVD polymerized nano films have advantages such as uniform film thickness, high temperature resistance, wear resistance, and high purity. It can be used to produce internal circuit boards for consumer electronics products such as smartphones, TWS earphones, laptops, etc., providing protection functions such as corrosion and moisture resistance. Meanwhile, it can also be used to prepare high-quality films such as diamond films, hard films, and carbon nanotubes (CNT).

5. In the field of new energy vehicles
Key component protection: PECVD polymer nanofilm has electronic protection properties and can be used to protect key components such as central control systems, boost charging systems, and BMS systems in new energy vehicles, improving system stability and safety.

6. Medical implants
Surface modification: The dense inert coating produced by PECVD technology has good biocompatibility and corrosion resistance, and can be used for surface modification of medical implants, such as artificial joints, dental implants, etc. This helps to improve the lifespan of implants and patient comfort.

7. Wear resistant coating
Wear resistance improvement: Wear resistant coatings such as diamond-like carbon (DLC) can be deposited on the surface of materials through PECVD technology, which can improve the wear resistance and low friction of materials. This has broad application prospects in fields such as mechanical parts, bearings, and sliding components.

8. Food packaging
Barrier performance improvement: PECVD technology can also be used to produce packaging materials with good barrier properties, such as potato chip bags and other food packaging materials. These materials can protect food from external pollutants and moisture, extending the shelf life of food.

9. Industrial control
Component protection: In harsh industrial environments, PECVD nano coating technology can be used to protect components and motherboards from moisture, chemicals, and other corrosion, improving product stability and reliability.

Commonly used PECVD furnaces (click on the image to view product details)

Overall, tube PECVD technology plays an important role in multiple industries due to its wide range of applications and numerous advantages. With the continuous advancement of technology and the expansion of application fields, its market prospects will become even broader.Click to learn more PECVD devices! Or click on online customer service to learn more about product information!