What are the applications of PECVD?

PECVD (Plasma Enhanced Chemical Vapor Deposition) technology has a wide range of application fields. Let’s take a detailed look at what PECVD is used in!

Commonly used PECVD electric furnaces (click on the image to view product details)

Semiconductor industry:
Used for manufacturing dielectric layers, low-k dielectric materials, and silicon-based optoelectronic devices in integrated circuits. For example, in CMOS (Complementary Metal Oxide Semiconductor) devices, PECVD is commonly used for the fabrication of gate oxide layers and field oxide layers, which are important for the performance and stability of the device.
When manufacturing microelectronic devices, PECVD technology can precisely control process parameters and deposit high-quality thin films on the substrate surface, such as silicon dioxide and silicon nitride dielectrics, for isolating multiple conductive layers and capacitors.

Photovoltaic industry:
It is the main deposition technology for manufacturing solar cells and photovoltaic modules. PECVD can uniformly deposit thin films on wide surface areas such as solar panels or optical glass. By adjusting plasma parameters, the refractive quality of optical coatings can be finely controlled, thereby improving the photoelectric conversion efficiency of solar cells.

In the field of optics:
PECVD technology can prepare thin films with various optical functions, such as absorption, transmission, reflection, refraction, and polarization properties. These films are widely used in optical products such as sunglasses, colored optical devices, and photometers to improve the optical performance and service life of the products.

Biomedical field:
The dense inert coating produced by PECVD technology has good biocompatibility and corrosion resistance, and can be used for surface modification of medical implants, such as artificial joints, dental implants, etc. These coatings can greatly improve the service life of implants and patient comfort.

In the field of automotive electronics:
PECVD nano coating technology has broad application prospects in the field of automotive electronics due to its excellent electronic protection performance. It can provide reliable protection for key components such as battery management systems (BMS), onboard sensors, headlight lenses, automotive interior parts, motors and electronic control units, as well as charging interfaces and connectors, improving the stability and safety of the system.

Wear resistant coating:
Wear resistant coatings such as diamond-like carbon (DLC) can be deposited on the surface of materials through PECVD technology, greatly improving their wear resistance and low friction properties. This type of coating has broad application prospects in fields such as mechanical parts, bearings, and sliding components.

Food packaging:
PECVD technology can also be used to produce packaging materials with good barrier properties, such as potato chip bags and other food packaging materials. These packaging materials can effectively protect food from external pollutants and moisture, extending the shelf life of food.

Industrial control:
In harsh industrial environments, PECVD nano coating technology can be used to protect components and motherboards from moisture, chemicals, and other corrosion, improving product stability and reliability.

Slide PECVD tube furnace (click on the picture to view product details)

Overall, PECVD technology plays an important role in multiple industries due to its significant advantages and wide range of applications. With the continuous advancement of technology and the expansion of application fields, the market prospects of PECVD technology will be even broader.Click to learn more PECVD devices! Or click on online customer service to learn more about product information!