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Tel Number
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| Product Name | Low Vacuum CVD System |
| Model | KJ-T1200-S60-CVD |
| Tube furnace part | |
| Furnace structure | Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃ |
| Furnace Material | High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field. |
| Max.Temperature | 1200℃ |
| Continuous working temperature | 1100℃ |
| Heating rate | Recommended ≤10°C/min, the fastest heating rate is 20°C/min |
| Furnace tube material | High purity quartz tube |
| Furnace tube size |
OD:60mm* ID:54mm * length 1200mm The instrument must be plugged in before use to prevent heat radiation |
| Heating zone length | 220+220+220mm |
| flange | Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange |
| Temperature Control System |
The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning |
| Heating element | Molybdenum alloy resistance wire |
| Temperature measuring element | K type thermocouple |
| Working power | AC220V，50/60Hz |
| Rated power | 5KW |
| Air inlet and outlet | The flange contains vacuum connection port, air inlet and outlet |
| Air system part | |
| Mass flowmeter |
Four-way precision mass flowmeter: digital display, automatic control of gas flow. MFC1 range: 0-500 sccm (range optional) MFC2 range: 0-500 sccm (range optional) MFC3 range: 0-500 sccm (range optional) MFC4 range: 0-500 sccm (range optional) Gas circuit: 4 channels |
| Vacuum system part | |
| vacuum pump | DRV10 rotary vane pump pumping |
