Can customized PECVD electric furnaces be made into multiple temperature ranges?

PECVD (Plasma Enhanced Chemical Vapor Deposition) electric furnace can achieve different deposition conditions in different temperature zones through multi zone design, which is suitable for depositing multi-layer or composite structure thin films. This design allows for different temperature gradients to be achieved in the same process, which helps to achieve uniform distribution and reaction of gas precursors on the substrate surface, thereby optimizing the microstructure, stress state, and other characteristics of the thin film.

Specifically, multi zone PECVD electric furnaces are typically equipped with multiple independent heating systems, each of which can precisely control the temperature of its responsible area. For example, some three temperature zone PECVD systems have a maximum temperature gradient of 200 ℃ in their three heating zones, allowing for the preparation of various materials under a wide temperature range.

In addition, the multi temperature zone PECVD electric furnace also has the following advantages:

Accurate temperature control: Through multiple PID temperature controllers, the temperature of different areas can be controlled separately to ensure that the entire deposition process is carried out within the ideal temperature range.
High process flexibility: The multi temperature zone design enables PECVD electric furnaces to meet the temperature requirements of different materials and processes, improving the flexibility and success rate of experiments.
Excellent film quality: By precisely controlling the temperature gradient, the growth process of the film can be optimized, the uniformity and adhesion of the film can be improved, and high-quality film products can be obtained.