Can a customized PECVD electric furnace be made into a slide?

The slide type PECVD system is a PECVD equipment with a specific design structure, which combines the characteristics of slide tube furnace and the advantages of PECVD technology. This system usually includes components such as PT-1200T tube furnace heating system, vacuum system, mass flow meter gas supply system, plasma RF power supply system, etc. The slide design allows the workpiece to enter from one end of the furnace along the slide and be transported to the other end of the furnace through a pipeline to complete the heat treatment or film deposition process.

The advantage of the slide type PECVD system lies in its continuous production line capability, which can be connected to other equipment such as cleaning machines, dryers, etc., to achieve automated continuous production. In addition, the slide design also facilitates the rapid temperature rise and fall of the workpiece, improving production efficiency. Meanwhile, the slide type PECVD system also retains the basic advantages of PECVD technology, such as low deposition temperature, fast deposition rate, and good film quality.

In practical applications, when customizing a slide type PECVD electric furnace, personalized design can be carried out according to specific process requirements and equipment dimensions. For example, suitable heating methods (such as resistance heating, induction heating, etc.), vacuum system configurations, gas flow control systems, etc. can be selected to meet the requirements of different materials and processes.