Specific application scenarios of CVD electric furnace and PECVD electric furnace

CVD electric furnace and PECVD electric furnace have wide applications in multiple fields, and their specific application scenarios are as follows:

Specific application scenarios of CVD electric furnace
Semiconductor industry:
Insulation layer deposition: used to deposit insulation layers such as silicon dioxide (SiO ₂) and silicon nitride (Si ∝ N ₄), which serve as electrical insulation, protection, and passivation in semiconductor devices.
Metal layer deposition: deposition of metal layers such as tungsten (W), titanium (Ti), titanium nitride (TiN), and aluminum (Al) for interconnection and contact hole filling.
Doping layer deposition: such as the deposition of phosphosilicate glass (PSG) and borosilicate glass (BSG), used for local doping and surface passivation to improve the performance of semiconductor devices.
Epitaxial growth: used for epitaxial growth of single crystal silicon or other semiconductor materials, such as silicon carbide and gallium nitride, to form high-quality single crystal layers on the surface of wafers.
High k material deposition: deposition of high k dielectric materials such as hafnium oxide (HfO ₂) and zirconium oxide (ZrO ₂) for MOSFET gate dielectric, reducing leakage current and improving device performance.
Barrier layer deposition: deposition of titanium nitride (TiN) and tantalum nitride (TaN) as diffusion barriers for copper interconnects, preventing metal diffusion and protecting device integrity.
Photovoltaic cells: used to manufacture thin-film solar cells, such as silicon thin films and compound semiconductor thin films (such as CdTe and CIGS), to improve photoelectric conversion efficiency.
Micro Electro Mechanical Systems (MEMS): Used for depositing materials such as polycrystalline silicon and silicon oxide, manufacturing micro mechanical structures and sensors.
Gas sensor: High sensitivity metal oxide semiconductor gas sensors are manufactured by depositing sensitive thin films through CVD, and are used in fields such as environmental monitoring and industrial control.
Optical and optoelectronic materials: materials used for the preparation of optical and optoelectronic devices, such as gallium nitride (GaN) and other III-V compound semiconductors, applied in fields such as LEDs and lasers.
Material preparation: Used for the preparation of nanomaterials, ceramic materials, metal films, etc., widely used in fields such as electronics, optics, aerospace, etc.
Specific application scenarios of PECVD electric furnace
Semiconductor industry:
Thin film material deposition: used to deposit various thin film materials, including insulation layers, passivation layers, and low-k dielectric materials, to improve the performance of semiconductor devices.
Optoelectronic device production: used to prepare key components in silicon-based optoelectronic devices such as optical waveguides and gratings.
Solar cell: It is an important deposition technology for manufacturing solar cells and photovoltaic modules, which can uniformly deposit thin films on a wide surface area, such as anti reflection films, transparent conductive films, etc., to improve the photoelectric conversion efficiency.
In the field of optics: used to produce coatings with specific optical properties, such as anti reflective coatings, anti reflective coatings, etc., applied to optical products such as sunglasses, colored optical equipment, and photometers.
Medical field:
Cardiovascular disease treatment: used to manufacture thin film materials with biocompatibility.
Surface modification: Used for surface modification of medical implants, such as artificial joints, dental implants, etc., to improve the service life of implants and patient comfort.
In the field of automotive electronics:
Battery Management System (BMS) Protection: Provides waterproof, moisture-proof, and corrosion-resistant protection for BMS circuit boards and electronic components.
Vehicle mounted sensor protection: Improve the environmental adaptability of sensors and reduce the impact of environmental factors on sensor accuracy and reliability.
Lamp lens protection: Provides waterproof, anti fog, and anti scratch capabilities to ensure that the lamp remains clear and bright in various weather conditions.
Wear resistant treatment of automotive interior parts: Enhance the wear resistance and pollution resistance of interior parts, and extend their service life.
Motor and electronic control unit protection: Provides waterproof, salt spray resistant, and corrosion-resistant protection to ensure stable operation of critical components in harsh environments.
Charging interface and connector protection: prevent the intrusion of moisture and dust, reduce the risk of short circuit and corrosion, and improve charging efficiency and safety.
Waterproof treatment of car cameras and sensors: provide waterproof and antifouling protection for cameras and sensors to ensure the normal operation of the auto drive system in various weather conditions.
In the field of consumer electronics, it is used to produce internal circuit boards for consumer electronics products such as smartphones, TWS earphones, laptops, etc., providing protection functions such as corrosion and moisture resistance.
Packaging materials: Used for producing packaging materials with good barrier properties, such as potato chip bags and other food packaging materials, to extend the shelf life of food.
In summary, CVD electric furnaces and PECVD electric furnaces have wide applications in various fields such as semiconductors, photovoltaics, optics, medical, and automotive electronics, but their respective application scenarios have their own focuses. CVD electric furnaces are more suitable for applications that require high-temperature deposition, while PECVD electric furnaces are more suitable for temperature sensitive substrates or complex thin film structures that require low-temperature deposition.