Which is more commonly used, PECVD electric furnace or CVD electric furnace?

PECVD electric furnace and CVD electric furnace have wide applications in their respective fields, and which one is more commonly used depends on the specific application scenario and requirements.

Common scenarios of CVD electric furnace
CVD electric furnaces have a wide range of applications in various fields, including:
Material preparation and thin film deposition: used for preparing metal thin films, semiconductor thin films, optical thin films, etc., widely used in industries such as electronics, semiconductors, and optics.
Nanomaterial preparation: By adjusting reaction conditions and substrate materials, nanomaterials with different morphologies and sizes can be synthesized.
Ceramic sintering: used for powder roasting and sintering of ceramic materials to prepare high-performance ceramic products.
High temperature experiment: As an experimental equipment, it can be used for various research experiments such as high-temperature atmosphere sintering, atmosphere reduction, vacuum annealing, etc.
Powder metallurgy: The formation of metal or ceramic materials through gas-phase reactions provides a new preparation method for the field of powder metallurgy.
Optical material synthesis: used to synthesize transparent optical materials for the preparation of optical devices and optical coatings.
Pharmaceutical industry: used to manufacture biocompatible film materials for the treatment of cardiovascular diseases, etc.
Common scenarios of PECVD electric furnace

PECVD electric furnaces have significant application advantages in the following fields:
Semiconductor industry: used for manufacturing dielectric layers, low-k dielectric materials, and silicon-based optoelectronic devices in integrated circuits.
Solar cell: It is the main deposition technology for manufacturing solar cells and photovoltaic modules, which can uniformly deposit thin films on a wide surface area to improve the photoelectric conversion efficiency.
In the field of optics: used to manufacture coatings with specific optical properties, such as anti reflective coatings, anti reflective coatings, etc.
Medical field: Used for surface modification of medical implants to improve their lifespan and patient comfort.
In the field of automotive electronics: providing reliable protection for critical components, improving system stability and safety.
Packaging materials: Used for producing packaging materials with good barrier properties to extend the shelf life of food.
general comparison
Deposition temperature: CVD electric furnaces are usually carried out at high temperatures, while PECVD electric furnaces can deposit at lower temperatures, making PECVD electric furnaces more suitable for temperature sensitive substrates.
Deposition rate and film quality: PECVD electric furnace has a fast deposition rate due to the introduction of plasma, and can prepare high-quality and high-density films.
Equipment cost and process complexity: CVD electric furnace equipment is relatively simple and cost-effective; The PECVD electric furnace equipment has a relatively complex process and high cost.
Application areas: CVD electric furnaces and PECVD electric furnaces have wide applications in their respective fields, but PECVD electric furnaces have more advantages in situations that require low-temperature deposition or complex thin film structures.