Daily maintenance of PECVD electric heating coating furnace

The daily maintenance of PECVD (plasma enhanced chemical vapor deposition) electric heating coating furnace is crucial for ensuring the stable operation of the equipment, extending its service life, and ensuring the quality of coating. The following are daily maintenance suggestions for PECVD electric heating coating furnace, summarized as follows:

1. Cleaning and Inspection
Cleaning of the cavity
Regular cleaning: After each use, the vacuum chamber should be cleaned to remove any residue and contaminants inside.
Cleaning method: Use specialized cleaning agents and tools to avoid damage to the cavity.
Electrode and sample stage inspection
Electrode cleaning: Regularly clean the surface of the electrode to ensure no oxides or contaminants, in order to ensure good conductivity.
Sample stage inspection: Check whether the sample stage is flat and free of scratches, ensuring that the sample can be uniformly heated and coated.
Vacuum system inspection
Sealing inspection: Regularly check the sealing of the vacuum system to ensure no air leakage.
Vacuum pump maintenance: Perform regular maintenance according to the instructions for using the vacuum pump, such as changing oil, cleaning the filter screen, etc.

2. Component maintenance and replacement
RF power maintenance
Regular inspection: Check the output power and stability of the RF power supply to ensure that it is within the normal range.
Heat dissipation inspection: Ensure good heat dissipation of the RF power supply to avoid performance degradation or damage caused by overheating.
Heating system maintenance
Temperature calibration: Regularly calibrate the temperature of the heating system to ensure precise temperature control.
Heating element inspection: Check whether the heating element is aging or damaged, and replace it in a timely manner if necessary.
Maintenance of gas supply system
Gas purity inspection: Ensure that the purity of the gas used meets the process requirements and avoid impurities affecting the quality of the coating.
Gas pipeline inspection: Regularly check whether the gas pipeline is leaking or blocked to ensure stable gas supply.
Replacement of vulnerable parts
O-rings and seals: Regularly replace O-rings and seals in vacuum chambers, gas pipelines, and other areas to prevent air leakage.
Filter and filter element: Regularly replace the filter and filter element in vacuum pumps, gas supply systems, etc. to ensure system cleanliness.

3. Safe operation and recording
Safety operation standards
Operation training: Ensure that operators have received professional training and are familiar with the operation process and safety regulations of the equipment.
Safety protection: Wear necessary protective equipment during operation, such as gloves, goggles, etc.
Operation records
Detailed records: After each use of the equipment, record in detail the operating status, process parameters, maintenance status, etc. of the equipment.
Fault analysis: Timely analyze and handle equipment faults, and record the causes and solutions of the faults.

4. Regular professional maintenance
Professional Inspection
Regularly invite professionals to conduct comprehensive inspections and maintenance of the equipment to ensure that its performance indicators meet the process requirements.
software upgrading
Pay attention to software updates: Timely monitor the update status of device control software, and upgrade it if necessary to improve the control accuracy and stability of the device.