Common faults and solutions of PECVD electric heating coating furnace

PECVD (Plasma Enhanced Chemical Vapor Deposition) electric heating coating furnace may encounter some common faults during use. The following is a summary of these faults and their solutions:

1. Unable to light up
Possible reasons:
RF power supply failure.
The intake of reactive gas is small.
The cleanliness of the cavity electrode plate is insufficient.
RF matching circuit malfunction.
The vacuum degree is too poor.
resolvent:
Check if the power output of the RF source power supply is normal. If it is abnormal, repair or replace it.
Check if the gas flow meter is normal. If it is normal, increase the intake volume for testing.
Measure the ground resistance of the upper and lower plates of the cavity with a multimeter. If there is any abnormality, clean the cavity plates.
Check if the reflected power of the RF source is within the normal range. If it is abnormal, check if the capacitors and inductors in the matching circuit are damaged and repair or replace them.
Check if the vacuum degree of the chamber is normal. If it is abnormal, check the vacuum system and eliminate the leakage point.

2. Unstable power supply current
Possible reasons:
The power supply is unstable.
resolvent:
Measure whether the power supply is stable. If it is unstable, check the power system and repair it.

3. Unstable vacuum chamber pressure
Possible reasons:
The leakage rate of the cavity vacuum system is abnormal.
The intake volume of the chamber is abnormal.
resolvent:
Check if the leakage rate of the vacuum system in the chamber is normal. If it is not normal, check and eliminate the leakage point.
Check if the intake volume of the chamber is normal. If it is not normal, adjust the gas flow meter or check the gas supply system.

4. Poor surface cleanliness of the sample
Possible reasons:
The surface of the sample is not clean.
resolvent:
Check if the surface of the sample is clean, and if not, clean the sample surface again.

5. Poor cleanliness of the process chamber
Possible reasons:
There are pollutants inside the process chamber.
resolvent:
Clean the interior of the process chamber to ensure no residual pollutants.

6. Abnormal sample temperature
Possible reasons:
The temperature control system is not functioning properly.
resolvent:
Check if the temperature control system is functioning properly, and if not, calibrate or repair it.

7. Abnormal pressure during film deposition process
Possible reasons:
The leakage rate of the cavity vacuum system is abnormal.
resolvent:
Check if the leakage rate of the vacuum system in the chamber is normal. If it is not normal, check and eliminate the leakage point.

8. Unreasonable RF power setting
Possible reasons:
Improper power setting of RF power supply.
resolvent:
Check if the power setting of the RF power supply is reasonable. If it is not reasonable, adjust the set power.

9. Abnormal cooling water flow and temperature
Possible reasons:
The cooling water system is not functioning properly.
resolvent:
Check if the cooling water flow and temperature are normal. If not, adjust the cooling water system or check the cooling water supply system.

10. Low vacuum chamber pressure
Possible reasons:
The process gas flow rate is abnormal.
resolvent:
Adjust the process gas flow rate to the normal range.