How to choose a PECVD electric heating coating furnace?

When choosing a PECVD electric heating coating furnace, the following aspects can be considered:

1. Temperature parameters
Maximum temperature: Ensure that the furnace can reach the required maximum operating temperature, typically up to 1200 ℃ or higher for PECVD electric furnaces.
Temperature control accuracy: High precision temperature control is crucial for the quality of thin film deposition, and the temperature control accuracy should reach ± 1 ℃ or higher.
Heating rate: A fast heating rate can improve production efficiency, and it is recommended to choose a furnace with a higher heating rate.

2. Vacuum system
Vacuum degree: Vacuum degree is a key parameter in the PECVD process, ensuring that the furnace can achieve the required vacuum degree, usually reaching 10 ^ -1 Pa or higher.
Extraction rate: A fast extraction rate can shorten the vacuum extraction time and improve production efficiency.

3. Gas control system
Multi channel quality flow control: capable of accurately controlling the flow rate of different gases to meet the requirements of different thin film deposition.
Gas mixing chamber: Helps to fully mix gases, ensuring the stability and uniformity of the deposition process.

4. RF power supply
Power output range: The power output range of the RF power supply should meet the requirements of thin film deposition, and usually the power output range should be adjustable.
Frequency stability: A stable RF frequency is crucial for the quality of thin film deposition.

5. Furnace structure
Material: The furnace body should be made of high temperature resistant and corrosion-resistant materials, such as high-purity alumina.
Size: Choose the appropriate furnace body size according to actual needs to ensure that it can accommodate the required samples.

6. Control system
Intelligent control: Choose furnaces with intelligent control systems, such as touch screen control, programmable temperature control systems, etc., to improve the convenience and accuracy of operation.
Safety protection: Ensure that the furnace is equipped with comprehensive safety protection devices, such as over temperature power-off alarm, overcurrent protection, etc.

7. Brand and after-sales service
Brand reputation: Choose stoves with good brand reputation to ensure product quality and reliable after-sales service.
After sales service: Understand the manufacturer’s after-sales service policy, including installation, debugging, training, maintenance, etc., to ensure timely technical support and service during use.

8. Price and cost-effectiveness
Price: Choose a suitable furnace based on the budget, while considering whether the performance and functionality of the furnace meet the requirements.
Cost effectiveness: Taking into account factors such as furnace performance, functionality, and price, choose a furnace with high cost-effectiveness.