What is the heat treatment temperature for PECVD electric furnace coating system?

The heat treatment temperature range of PECVD (plasma enhanced chemical vapor deposition) electric furnace coating system is usually wide, and the specific temperature depends on the deposited thin film material, process requirements, and equipment performance. Let’s take a detailed look below!

Commonly used tubular PECVD electric furnace (click on the image to view product details)

General temperature range
Common temperature: The deposition temperature of PECVD technology is generally less than 600 ℃, which expands the applicability range of substrate materials.
Specific process temperature: For example, when depositing silicon nitride thin films, the substrate temperature should generally be between 300 ℃ and 450 ℃. Silicon nitride films deposited below 250 ℃ may have significant intrinsic stress, while films deposited above 450 ℃ are prone to cracking.

The impact of equipment performance on temperature
Equipment type: The maximum temperature and temperature control accuracy of different types of PECVD electric furnace coating systems may vary. For example, the maximum temperature of some PECVD systems can reach 1200 ℃, and the temperature control accuracy can reach ± 1 ℃.
Temperature control: A good PECVD electric furnace coating system is usually equipped with a high-precision temperature control system, such as a PID control temperature controller, which can achieve multi-stage programmable control to ensure precise and reliable temperature control.

Optimization of process parameters on temperature
Deposition rate: By adjusting the heat treatment temperature, the deposition rate can be influenced. For example, increasing the temperature within a certain range can increase the deposition rate, but excessively high temperatures may lead to a decrease in film quality.
Film properties: The heat treatment temperature can also affect the crystallinity, stress, refractive index, and other properties of the film. Therefore, in the PECVD electric furnace coating process, it is necessary to optimize the temperature according to specific requirements.

Precautions
Temperature uniformity: During the PECVD electric furnace coating process, it is necessary to ensure uniform temperature distribution inside the furnace to avoid uneven film performance caused by temperature gradients.
Safe operation: Due to the high temperature and plasma hazards involved in the PECVD electric furnace coating system, strict adherence to safety operating procedures is required during use.

Customized tilted rotating PECVD coating electric furnace (click on the image to view product details)

In general, the coating temperature of PECVD electric furnace depends on the specific material and process, and the common temperature is generally between 300-1200 ℃.Click to learn more PECVD devices! Or click on online customer service to learn more about product information!