Features
1.Split Chamber for fast cooling and fast heating.
2.Touch screen interactive mode.
3.Uniform Temperature.
Descriptions
|
Product |
Touch Screen 1200c single heating zone 2 gas channels CVD Furnace System |
|
Chamber Type |
Split Chamber |
|
Display |
Touch Screen |
|
Chamber Material |
Alumina Fiber |
|
Heating Element |
Aludirome |
|
Max Temperature |
1200°C |
|
Usable Range |
≤1150°C |
|
Heating Rate |
≤20°C(suggestion:10°C/min) |
|
Heating Zone |
Single |
|
Heated length |
440mm |
|
Length constant temperature |
200mm |
|
Tube Material |
High purity quartz |
|
Tube Size |
Φ50mmx1000mm |
|
|
Φ60mmx1000mm |
|
|
Φ80mmx1000mm |
|
|
Φ100mmx1000mm |
|
Vacuum Seal |
4.03×10-3Pa |
|
Temperature Control |
PID automatic control via SCR power control |
|
Accuracy |
±1°C |
|
Preset curve |
10 |
|
Thermocouple |
K Type |
|
Working Voltage |
220V 50Hz~60Hz |
|
Max. Power |
2.5KW |
|
Gas Channels |
3 (or as client’s requirement) |
|
flowmeter |
float flowmeter |
|
Channel A range |
10~100ml/min |
|
Channel B range |
16~160ml/min |
|
Vacuum degree |
5~10Pa(If you need different vacuum,please choose other vacuum pump.) |