Common faults and solutions of customized CVD coating electric furnace

Customized CVD coating electric furnaces may encounter various faults during use. Here are some common faults and their solutions:

1. Temperature control malfunction
Fault phenomenon
The furnace temperature is inconsistent with the displayed temperature.
The temperature cannot be stably controlled and fluctuates greatly.
Possible reasons
The temperature sensor is damaged or aged, resulting in inaccurate measurements.
The installation position of the temperature sensor is incorrect and not located in an area where the furnace temperature is evenly distributed.
The control system is unstable, with software malfunctions or incorrect parameter settings.
Improper PID parameter settings result in inaccurate temperature control.
resolvent
Replace or calibrate the temperature sensor to ensure accurate measurement.
Adjust the installation position of the temperature sensor to be in an area where the furnace temperature is evenly distributed.
Check and correct the software settings of the control system to ensure that the parameter settings are correct and error free.
Adjust the PID parameters according to the actual situation to achieve better temperature control effect.

2. Gas flow and mixing faults
Fault phenomenon
Inaccurate gas flow control leads to unstable coating quality.
Uneven gas mixing affects the coating effect.
Possible reasons
Gas flow controller malfunction or insufficient accuracy.
The design of the gas distribution system is unreasonable, resulting in uneven gas flow.
Design defects in the reaction chamber affect the gas mixing effect.
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Check and replace the faulty gas flow controller to ensure accuracy meets the requirements.
Optimize the design of gas distribution system to ensure uniform gas flow.
Optimize the design of the reaction chamber, such as adding a mixer or adjusting the position of the inlet to improve gas mixing performance.

3. Substrate processing failure
Fault phenomenon
Improper pre-treatment of substrate coating leads to poor coating quality.
Impurities or contamination on the surface of the substrate can affect the coating effect.
Possible reasons
Improper substrate pretreatment process, such as incomplete cleaning, inadequate polishing, etc.
Substrate material issues, such as surface defects and high impurity content.
resolvent
Improve the substrate pretreatment process, such as adding cleaning steps and improving polishing quality.
Replace the substrate material with better quality to ensure a clean and impurity free surface.

4. Incomplete cleaning of equipment
Fault phenomenon
There are residues inside the equipment, which affect the quality of the coating.
There is still an odor or residue after cleaning the equipment.
Possible reasons
Improper cleaning methods, such as inappropriate selection of cleaning agents, insufficient cleaning time, etc.
The equipment structure is complex and difficult to thoroughly clean.
resolvent
Strengthen equipment cleaning work, use appropriate cleaning agents and methods to ensure that there are no residues inside the equipment.
For equipment with complex structures, methods such as disassembly cleaning or high-pressure water gun cleaning can be used.

5. Other faults
Fault phenomenon
The unstable power supply voltage leads to abnormal operation of the equipment.
Poor sealing of the equipment leads to heat dissipation or gas leakage.
Possible reasons
The power supply voltage fluctuates greatly, affecting the normal operation of the equipment.
The aging or damage of equipment seals leads to poor sealing performance.
resolvent
Ensure stable power supply voltage, and install voltage regulators and other equipment if necessary.
Check and replace aging seals to ensure good sealing of the equipment.

6. Preventive measures
Regularly maintain and upkeep CVD coating furnaces, including cleaning, calibration, and inspection.
Introduce better real-time monitoring technologies (such as spectroscopic analysis, atomic force microscopy, etc.) to monitor key parameters during the reaction process in real-time.
Develop and adhere to standard operating procedures (SOP), standardize operational steps, and reduce the occurrence of malfunctions caused by human error.
Regular training and skill enhancement should be provided to operators to enable them to master the principles, operating procedures, and troubleshooting methods of CVD coating electric furnaces proficiently.

In summary, common faults in customized CVD coating electric furnaces involve temperature control, gas flow and mixing, substrate processing, equipment cleaning, and other aspects. By adopting appropriate solutions and preventive measures, these faults can be effectively resolved and the stability and reliability of the equipment can be improved.