Daily maintenance of CVD electric furnace used in laboratory

The daily maintenance of CVD electric furnaces used in laboratories is the key to ensuring their long-term stable operation and extending their service life. Here are some suggestions for daily maintenance of CVD electric furnaces:

1. Oven and preheating
After the first use or long-term shutdown: When the CVD electric furnace is used again after the first use or long-term shutdown, an oven drying operation should be carried out. The purpose of an oven is to remove moisture and impurities from the furnace and avoid adverse effects during the heating process. The temperature and time of the oven should be set according to specific circumstances, usually including the process of rising from room temperature to a certain temperature and maintaining it for a period of time.
Daily preheating: Preheat the CVD electric furnace before each use to ensure uniform temperature distribution inside the furnace and reduce damage to the furnace and heating elements caused by rapid heating.
2. Furnace cleaning
Regular cleaning: Regularly clean the interior of the furnace to remove accumulated impurities and residue. This helps to maintain the cleanliness of the furnace and improve the quality and uniformity of the deposited film.
Use specialized tools: During the cleaning process, specialized tools should be used to avoid damage to the furnace and heating elements.
3. Inspection and maintenance
Heating element: Regularly check the connection points and overall condition of the heating element to ensure that it is intact and undamaged. Damaged or aged heating elements should be replaced promptly.
Temperature control system: Check if the electrical connections of the temperature control system are in good contact, especially if the connection points of the heating elements are securely fastened. At the same time, check whether the temperature sensor and controller are accurate and reliable.
Exhaust valve and gas system: Check whether the exhaust valve can be opened and closed normally, and whether the gas system is unobstructed. For abnormal situations, relevant components should be promptly handled or replaced.
Furnace cover and sealing: Ensure good sealing of the furnace cover to avoid gas leakage. For the aging and damage of seals, they should be replaced in a timely manner.
4. Operating standards
Strictly follow the operating procedures: During the operation process, it is necessary to strictly follow the operating procedures of the CVD electric furnace to avoid malfunctions and damages caused by improper operation.
Wear protective equipment: Operators should wear necessary protective equipment, such as safety goggles, gloves, etc., to ensure personal safety.
5. Storage and protection
Dry storage: When not in use, the CVD electric furnace should be placed in an air dry room to prevent moisture and damage to the furnace.
Dust prevention measures: Take appropriate dust prevention measures for CVD electric furnaces, such as using dust covers, to reduce the erosion of equipment by dust.

In summary, the daily maintenance of CVD electric furnaces used in laboratories involves multiple aspects such as oven drying and preheating, furnace cleaning, inspection and maintenance, operating standards, and storage and protection. By conscientiously implementing these maintenance measures, the long-term stable operation and extended service life of CVD electric furnaces can be ensured.