Common faults and solutions of CVD electric furnaces used in laboratories

The CVD (Chemical Vapor Deposition) electric furnace used in the laboratory may encounter various faults during use. The following are some common faults and their solutions:

1. Temperature control malfunction
The temperature cannot reach the set value

Possible reasons:
Heating element malfunction or aging.
Control system issues, including improper controller and PID parameter settings.
Temperature sensor malfunction or inaccurate location.
resolvent:
Check and replace damaged or aged heating elements.
Check the control system to ensure that the controller and PID parameters are set correctly.
Calibrate or replace the temperature sensor to ensure its accuracy and correct position.
Large temperature fluctuations

Possible reasons:
Wind circulation system malfunction.
Poor contact of thermocouple.
The control system is unstable.
resolvent:
Check and repair the air circulation system to ensure normal air circulation.
Check the connection of the thermocouple to ensure good contact.
Adjust PID parameters to optimize the stability of the control system.
2. Gas flow and mixing faults
Inaccurate gas flow control

Possible reasons:
Gas flow controller malfunction.
The design of the gas distribution system is unreasonable.
resolvent:
Repair or replace faulty gas flow controllers.
Optimize the design of gas distribution system to ensure uniform gas flow.
Uneven gas mixing

Possible reasons:
Design flaws in the reaction chamber.
The mixing device has poor performance.
resolvent:
Optimize the design of the reaction chamber, such as adding a mixer or adjusting the position of the air inlet.
Strengthen the monitoring of the reaction process to ensure even gas mixing.
3. Equipment operation and safety faults
Electric furnace has no reaction

Possible reasons:
Power failure.
Control circuit issues.
The safety lock has not been released.
resolvent:
Check if the power supply is working properly and if the plug is plugged in properly.
Check the control circuit and eliminate short circuits or open circuits.
Confirm that the security lock has been released and the device is in a bootable state.
The alarm sound persists

Possible reasons:
Excessive temperature triggers overheating protection.
Sensor malfunction or detachment.
resolvent:
Check the temperature inside the furnace and lower the set temperature value.
Check if the temperature sensor is damaged or detached, ensuring that the sensor is connected correctly and in good condition.
4. Equipment cleaning and maintenance failures
Incomplete cleaning of equipment

Possible reasons:
Improper cleaning method.
The selection of cleaning agent is inappropriate.
resolvent:
Strengthen equipment cleaning work and use appropriate cleaning agents and methods.
Regularly maintain and upkeep equipment, including cleaning equipment, checking electrical connections, etc.
5. Other faults
Inconsistencies between furnace temperature and displayed temperature

Possible reasons:
The temperature sensor is damaged or aged.
Improper PID parameter settings.
There are impurities or carbon deposits in the furnace.
resolvent:
Replace or calibrate the temperature sensor.
Adjust PID parameters to achieve better temperature control performance.
Regularly clean the debris and carbon deposits in the furnace.
Comprehensive recommendations
Regularly maintain and upkeep CVD electric furnaces, including checking the working status of key components such as heating elements, temperature sensors, and control systems.
Introduce real-time monitoring technologies (such as spectroscopic analysis, atomic force microscopy, etc.) to monitor and adjust key parameters during the reaction process in real-time.
Adhere to standard operating procedures (SOP) and standardize operating procedures to reduce the occurrence of malfunctions caused by human errors.
Regular training and skill enhancement should be provided to operators to enable them to proficiently master the principles, operational steps, and troubleshooting methods of CVD process.
By implementing the above measures, the failure rate of CVD electric furnaces can be effectively reduced and the stability and reliability of the equipment can be improved.