Daily maintenance of multi gas path PECVD electric furnace

The daily maintenance of multi gas path PECVD (plasma enhanced chemical vapor deposition) electric furnace is the key to ensuring its stable operation and extending its service life. Here are some recommended daily maintenance steps and precautions:

1. Cleaning and maintenance
Regular cleaning:
Use a vacuum cleaner or a soft brush to remove dust and impurities from the surface of the electric stove.
For stubborn stains that are difficult to remove, mild cleaning agents and soft cloths can be used for wiping, but rough tools or chemical solvents should be avoided to avoid damaging the surface of the electric furnace.
Cleaning of plasma source and gas outlet:
Regularly inspect and clean the outlet of the plasma source and process gas to ensure smooth gas circulation.
If the air outlet is blocked, a fine needle or drilling machine can be used to clear it, but caution should be taken during operation to avoid damaging the equipment.
Cleaning of reaction chamber and cooling chamber:
Regularly open the reaction chamber and cooling chamber to remove residues and impurities inside.
When cleaning, follow the maintenance manual provided by the equipment manufacturer or contact professional technicians for maintenance operations.

2. Electrical component inspection
Inspection of power cords and sockets:
Regularly check whether the power cord is damaged or aged to ensure stable and reliable power connection.
Check if the socket is securely fastened to avoid loose connections and poor contact.
Temperature sensor inspection:
Regularly check the accuracy and sensitivity of the temperature sensor to ensure that it can accurately reflect the temperature inside the electric furnace.
If any abnormality is found in the temperature sensor, it should be calibrated or replaced in a timely manner.
Thermocouple inspection:
Thermocouples are key components of electric furnaces used for temperature control and detection.
Regularly check the thermocouple for looseness or damage, ensuring that its head remains clean and free of oxides or other residues.

3. Safety facility inspection
Inspection of safety valves and alarms:
Regularly check whether the safety valve and alarm are working properly, ensuring that they can promptly issue alarms and take corresponding safety measures in emergency situations.
Inspection of protective equipment:
Check whether the protective equipment of the operators is complete, including protective clothing, gloves, goggles, etc., to ensure the safety of the operation process.

4. Daily maintenance records
Establish and maintain records:
Establish a comprehensive system for equipment maintenance records and analysis, recording information such as the time, content, problems discovered, and solutions for each maintenance.
By analyzing maintenance data, continuously optimize maintenance cycles and maintenance content.
Preventive maintenance:
Through regular preventive maintenance, potential problems and hazards can be identified and eliminated in a timely manner to avoid equipment failures.

5. Precautions
To avoid damaging equipment:
When performing maintenance, follow the maintenance manual provided by the equipment manufacturer or contact professional technicians to avoid using improper tools or methods that may cause equipment damage.
Preventing static electricity and other issues:
During the cleaning and maintenance process, attention should be paid to preventing static electricity and other issues to ensure the safety of the operation.
Regular professional training:
Regularly provide professional training to operators to improve their equipment operation and maintenance skills.

In summary, the daily maintenance of multi gas path PECVD electric furnaces includes cleaning and maintenance, electrical component inspection, safety facility inspection, daily maintenance records, and precautions. Through regular maintenance and upkeep, the stable operation and extended service life of the equipment can be ensured.