How to choose an experimental multi gas path CVD tube furnace?

The selection of experimental multi gas path CVD tube furnace involves multiple aspects to ensure that it can meet the specific needs and conditions of the experiment. Let’s take a detailed look at what aspects to pay attention to when choosing an experimental multi gas path CVD tube furnace!

A commonly used experimental CVD tube furnace with multiple gas paths and temperature zones (click on the image to view product details)

1. Temperature range and accuracy
Temperature range: Select a tube furnace with an appropriate temperature range based on the high or low temperature environment required for the experiment. The common working temperature range of CVD tube furnaces is between 800 ℃ and 1600 ℃, and some can even reach 1700 ℃.
Temperature accuracy: High precision temperature control is important for the reproducibility of experimental results. Choose a tube furnace with a high-precision temperature control system, such as equipment using PID automatic control, thyristor (thyristor) output power, 30 segment programmable controller, and other technologies.

2. Specification of tube furnace
Furnace tube size: Select the appropriate furnace tube size based on the size and shape of the experimental sample. The common outer diameters of furnace tubes include Φ 60, Φ 80, Φ 100, etc., and the length is usually within 1000mm.
Heating zone and constant temperature zone: The heating zone determines the heating range inside the furnace tube, while the constant temperature zone determines the area of temperature uniformity. Choose a tube furnace with sufficient heating and constant temperature zones to ensure uniform heating of the experimental samples.

3. Multi pneumatic system
Gas supply system: The experimental multi gas path CVD tube furnace needs to be equipped with a good multi gas path gas supply system to achieve the mixing of two or more gases or vapors in a certain proportion and their introduction into the high-temperature furnace. The gas supply system should be equipped with multiple flow meters, such as float flow meters and mass flow meters, to accurately control the intake air volume.
Mixing device: Choose a tube furnace with an efficient mixing device to ensure the uniformity and stability of gas mixing.

Customized dual furnace slide experimental multi gas path CVD tube furnace (click on the picture to view product details)

4. Vacuum system
Vacuum requirement: Choose a suitable vacuum system based on the required vacuum level and cleanliness for the experiment. Common vacuum systems include low vacuum systems and high vacuum systems, using imported or domestically produced molecular pumps and other equipment.
Vacuum gauge: Choose a tube furnace equipped with a vacuum gauge to monitor the vacuum status inside the furnace in real time.

5. Control system and security
Control system: Choose a tube furnace with advanced control system and human-machine interface, such as touch screen control, remote monitoring, etc., to improve the convenience and safety of operation.
Safety performance: Consider the safety performance of the tube furnace, such as overheat protection, leakage protection, emergency shutdown and other safety devices.

6. Brand and after-sales service
Brand selection: Choose well-known brands and tube furnace manufacturers with good reputation to ensure the quality and stability of the equipment.
After sales service: Understand the manufacturer’s after-sales service policy, including support for installation and commissioning, technical training, maintenance, and other aspects.

Vacuum experimental type multi gas path CVD tube furnace (click on the picture to view product details)

The selection of experimental multi gas path CVD tube furnace requires comprehensive consideration of temperature range and accuracy, tube furnace specifications, multi gas path system, vacuum system, control system and safety, as well as brand and after-sales service. By carefully comparing different brands and models of tube furnaces, combined with the specific needs and conditions of the experiment, choose the more suitable equipment.Click to learn more experimental multi gas path CVD tube furnaces! Or click on online customer service to learn more about product information!