Common faults and solutions of PECVD coating electric furnace

PECVD (Plasma Enhanced Chemical Vapor Deposition) coating electric furnace is widely used in the semiconductor industry, but it may also encounter some common faults during its operation. Here are some common faults and their solutions:
Common faults and solutions
Abnormal vacuum degree
Fault phenomenon: The vacuum degree cannot reach the set value or fluctuates greatly.
Possible reasons:
Vacuum pump malfunction or performance degradation.
The sealing of the cavity or pipeline is not tight, and there are leakage points.
Vacuum gauge malfunction or inaccurate reading.
resolvent:
Check and repair the vacuum pump to ensure its normal operation.
Check the sealing of the cavity and pipeline, and repair the leakage point.
Calibrate or replace the vacuum gauge to ensure accurate readings.
Cooling water flow alarm
Fault phenomenon: Insufficient cooling water flow or alarm.
Possible reasons:
Insufficient water pressure at the inlet or outlet of the cooling water.
The cooling water pipeline is blocked or leaking.
Cooling water flow meter malfunction.
resolvent:
Adjust the water pressure at the inlet and outlet of the cooling water to the normal range.
Check and clean the cooling water pipeline, and repair the leakage point.
Calibrate or replace the cooling water flow meter.
Abnormal high-frequency generator
Fault phenomenon: The high-frequency generator cannot start or the power is unstable.
Possible reasons:
RF power supply failure.
RF matching circuit malfunction.
Poor or damaged cable contact.
resolvent:
Check if the power output of the RF power supply is normal, and repair or replace it if necessary.
Check if the capacitors and inductors in the RF matching circuit are damaged, repair or replace them.
Check if the cable contact is good, repair or replace damaged cables.
Coating quality issues
Fault phenomenon: uneven coating, defects or severe color difference.
Possible reasons:
Unstable or disproportionate gas flow rate.
The cleanliness of the cavity is insufficient.
The sample temperature is abnormal.
resolvent:
Adjust and stabilize the gas flow rate to ensure the correct ratio.
Regularly clean the chamber to maintain its cleanliness.
Check and calibrate the temperature control system to ensure that the sample temperature is normal.
Unable to light up
Fault phenomenon: The RF power supply cannot generate plasma.
Possible reasons:
RF power supply failure.
The intake of reactive gas is small.
The cleanliness of the cavity electrode plate is insufficient.
resolvent:
Check and repair the RF power supply.
Increase the intake of reaction gas to ensure sufficient supply.
Clean the chamber plates to improve their cleanliness.
matters needing attention
When dealing with PECVD coating furnace faults, it is essential to follow safety operating procedures to ensure personal and equipment safety.
For unfamiliar fault phenomena and causes, equipment suppliers or professional maintenance personnel should be contacted in a timely manner for handling.
Regular maintenance and upkeep of equipment can effectively prevent malfunctions from occurring.