Application fields of vacuum coated PECVD electric furnace

1. Semiconductor industry
Integrated Circuit Manufacturing: PECVD is one of the key technologies for manufacturing integrated circuits in the semiconductor industry. It can precisely control process parameters and deposit high-quality thin films on the substrate surface, such as silicon dioxide and silicon nitride dielectrics, for isolating multiple conductive layers and capacitors.
Solar cell manufacturing: PECVD is a key deposition technology for manufacturing solar cells and photovoltaic modules. It can uniformly deposit thin films on wide surface areas such as solar panels or optical glass. By adjusting the plasma parameters, the refractive quality of the optical coating can be finely controlled, thereby improving the photoelectric conversion efficiency of solar cells.
2. Optical field
Optical coatings: PECVD technology is widely used to produce coatings with specific optical properties, such as anti reflective coatings, anti reflective coatings, etc. These coatings can be used for optical products such as sunglasses, colored optical devices, and photometers to improve the optical performance and service life of the products.
Optical thin film preparation: PECVD technology can prepare various optical thin films, such as anti reflective films, reflective films, filters, etc., which are widely used in optical instruments, photography equipment, lighting and other fields.
3. Materials Science
Preparation of nano thin films: PECVD polymerized nano thin films have the advantages of uniform film thickness, high temperature resistance, wear resistance, and high purity, and are in high demand in the field of consumer electronics. It can be used to produce internal circuit boards for consumer electronics products such as smartphones, TWS earphones, laptops, etc., providing protection functions such as corrosion and moisture resistance.
Wear resistant coating: Wear resistant coatings such as diamond-like carbon (DLC) can be deposited on the surface of materials through PECVD technology, significantly improving the wear resistance and low friction of materials. This type of coating has broad application prospects in fields such as mechanical parts, bearings, and sliding components.
4. In the field of new energy
New energy vehicles: PECVD polymer nano films have electronic protection properties and can be used to protect key components such as central control systems, boost charging systems, and BMS systems in new energy vehicles, improving system stability and safety.
5. Medical field
Medical implants: Dense inert coatings produced through PECVD technology have excellent biocompatibility and corrosion resistance, and can be used for surface modification of medical implants, such as artificial joints, dental implants, etc., to improve the service life of implants and patient comfort.
6. Other fields
Food packaging: PECVD technology can also be used to produce packaging materials with excellent barrier properties, such as potato chip bags and other food packaging materials, to protect food from external pollutants and moisture.
Industrial control: In harsh industrial environments, PECVD nano coating technology can be used to protect components and motherboards from moisture, chemicals, and other corrosion, improving product stability and reliability.
In summary, vacuum coated PECVD electric furnaces play an important role in multiple industries due to their wide range of application fields and unique technological advantages. With the continuous progress of technology and the expansion of application fields, their market prospects will become even broader.