What are the precautions for using PECVD furnace?

PECVD (Plasma Enhanced Chemical Vapor Deposition) furnace is an advanced equipment used for depositing thin films on material surfaces. During its use, multiple aspects need to be taken into account to ensure safe, efficient, and stable operation. The following is a detailed summary of the precautions for using PECVD furnaces:

1. Safe operation
Personnel training and authorization
Untrained and qualified personnel are not allowed to operate the equipment.
Unauthorized operators are strictly prohibited from handling abnormal situations without authorization.
Personal protection
When entering the machine, gloves should be worn to avoid touching high-temperature or corrosive components such as graphite boats and stainless steel mesh covers on the car with bare hands.
Wear protective clothing, corrosion-resistant masks, and protective glasses to prevent harm caused by chemicals and high temperatures.
Mechanical motion safety
Do not casually insert your head into the machine to avoid being injured by mechanical movements.
When the boat and oar come out of the furnace tube, there is high temperature, so be careful of burns when moving the cart.
Emergency stop
When there is an abnormality in the device’s movement mechanism, immediately press the “HANDLING STOP” button to stop the movement mechanism.
When the boat oar separates or the oar gets stuck by the furnace tube, press the emergency stop button and contact the equipment personnel and process leader.

2. Equipment operation and maintenance
Preparation before operation
Before entering the machine, turn the selection switch to manual “HAND” and wait for the robotic arm to stop after executing the command before entering.
Check the direction of the electrode holes on the boat and the position of the adhesive tape on the cart to ensure accuracy before proceeding with the operation.
Equipment inspection and maintenance
Regularly check the working status of safety devices to ensure they are in good condition.
Regular maintenance and upkeep of equipment, including cleaning and replacing worn parts.
Cutting and cooling
After cutting, promptly push the trolley into the cooling room. After unlocking the trolley, it is strictly prohibited to place it in the equipment and not move it away.
Boats and paddles that have not been used for a long time should be removed in a timely manner to prevent deformation.

3. Gas and pressure control
Gas preheating and flow rate
PECVD tube furnaces typically have a gas preheating zone to increase deposition rate and film formation effect.
When introducing gas into the furnace tube, it is necessary to control the gas flow rate to be less than 200SCCM to avoid impact on the heating quartz tube.
pressure control
The air pressure inside the furnace tube cannot exceed 0.02MPa, and a pressure reducing valve needs to be installed to ensure safety.
When the temperature of the furnace body exceeds 1000 ℃, the air pressure inside the furnace tube needs to be equivalent to atmospheric pressure and maintained at normal pressure.

4. Other precautions
Avoid rolling and collision
Fragile items such as quartz devices, graphite boats, and paddles should be handled with care during installation and unloading to avoid rolling and collision.
Equipment care
During production, there must be someone to monitor the operation of the machine in order to promptly detect and handle any abnormal situations.
Recording and reporting
Detailed records of equipment operation status, maintenance records, fault handling, etc. are kept for subsequent analysis and improvement.

In summary, the use of PECVD furnaces involves multiple precautions, from safe operation to equipment maintenance, gas and pressure control, all of which require strict adherence to relevant regulations and operating procedures. Only in this way can we ensure the safe, efficient, and stable operation of the PECVD furnace.