What are the application scenarios of PECVD electric furnaces?

PECVD (Plasma Enhanced Chemical Vapor Deposition) electric furnace has a wide range of application scenarios in multiple fields due to its unique advantages. The following are some main application scenarios:

Photovoltaic industry:
Solar cells: PECVD is a key technology for manufacturing important thin film layers (such as silicon nitride passivation layer, amorphous silicon layer, etc.) in solar cells. These thin film layers are crucial for improving the conversion efficiency and stability of solar cells.

Semiconductor industry:
Microelectronic devices: In the semiconductor manufacturing process, PECVD is used to deposit high-quality insulation layers, passivation layers, diffusion barrier layers, etc., to meet the high material performance requirements of microelectronic devices.
Integrated circuits: In the manufacturing of integrated circuits, PECVD technology can be used to form various thin films to improve the electrical performance and reliability of devices.

Display manufacturing:
OLED (Organic Light Emitting Diode) Display: PECVD can be used to deposit thin film layers before organic light emitting layers, such as electron transport layers, hole injection layers, etc., to improve the performance of OLED displays.
LCD (Liquid Crystal Display): In LCD manufacturing, PECVD can be used to deposit various optical films, such as transparent conductive films, protective films, etc.

Optics and Optoelectronic Devices:
Fiber manufacturing: PECVD can be used for the manufacturing of fiber preforms, forming fiber cores and cladding by depositing materials such as silica.
Optical waveguide: In the manufacturing of optical waveguides and other optoelectronic devices, PECVD is used to deposit high and low refractive index materials to control the propagation path of light.

Surface coating and modification:
Hard coating: PECVD can be used to deposit hard coatings on substrates such as metals, ceramics, and glass to improve their wear resistance, corrosion resistance, and scratch resistance.
Biocompatibility coating: PECVD can deposit biocompatible coatings on medical devices and implants to reduce immune responses to the human body and improve the lifespan of the device.

Energy storage technology:
Lithium ion batteries: PECVD can be used to deposit solid electrolytes or electrode material layers in lithium-ion batteries to improve the energy density and cycling stability of the battery.

Other fields:
Automotive industry: used to manufacture transparent conductive films on car window glass to achieve functions such as defrosting and defogging.
Building materials: Depositing functional films, such as self-cleaning films, insulation films, etc., on building materials such as glass and ceramics.

The application scenarios of PECVD electric furnaces are very extensive, and with the continuous progress of technology and the reduction of costs, their application areas will continue to expand.