Can PECVD electric heating coating furnace be used for graphene growth?PECVD (Plasma Enhanced Chemical Vapor Deposition) technology is a technique that generates glow discharge on the cathode of a process chamber through low-temperature plasma in a low-pressure environment, and then uses this discharge effect (or supplemented with a heating device) to heat the sample to a preset temperature. Subsequently, an appropriate amount of process gas is introduced, and complex chemical and plasma reactions occur under the action of a radio frequency electric field, ultimately depositing a solid thin film on the surface of the sample. Graphene, as a two-dimensional carbon nanomaterial composed of carbon atoms in sp ² hybridized orbitals forming a hexagonal honeycomb lattice, can also be grown by PECVD technology.
04-02
Daily maintenance of PECVD electric heating coating furnaceThe daily maintenance of PECVD (plasma enhanced chemical vapor deposition) electric heating coating furnace is crucial for ensuring the stable operation of the equipment, extending its service life, and ensuring the quality of coating. The following are daily maintenance suggestions for PECVD electric heating coating furnace, summarized as follows:
What are the advantages of PECVD electric heating coating furnace?PECVD (Plasma Enhanced Chemical Vapor Deposition) electric heating coating furnace has many advantages, which make it widely used in multiple industries. The following are the main advantages of PECVD electric heating coating furnace:
What is the working principle of PECVD electric heating furnace?The working principle of PECVD (Plasma Enhanced Chemical Vapor Deposition) electric heating furnace is mainly based on the chemical reaction and thin film deposition process of low-temperature plasma in low-pressure environment. Here is its detailed working principle:
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