Part I Tube furnace |
Furnace structure |
- Double-layer steel structure with air cooling.
- Split door design for easy installation of tube.
- High purity Al2O3 fibrous insulation designed for maximum energy saving. |
Furnace Tube
(Horizontal)
|
High purity quartz tube
Tube diameter:OD30mm
Heating zone length: double 300+300mm |
Sealing Flanges
(Horizontal) |
Left flange: water-cooled flange with a needle valve and a mechanical pressure gauge;
Right flange: a flange with a KF25 port directly couples with the electrostatic precipitator. |
Furnace Tube
(Vertical) |
High purity quartz tube
Tube diameter:OD30mm
Heating zone length: double 300+300mm
- Frits with forced convection design can trap the particles within the central heating area
Frit: 15~40 microns porous, 22mm O.D x 4mm thick(Can be customized according to customer needs) |
Sealing Flanges
(Vertical) |
Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting;
Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust. |
Working Temperature |
1100℃ (continuous) |
Maximum Temperature |
1200℃ (for short time) |
Temperature Controller |
-Two separate temperature controllers.
-30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy. |
Heating Rate |
0~20℃/min (suggestion: ≤10℃) |
Heating Element |
Resistance wire with Mo |
Thermocouple |
N type |
Work station |
Horizontal and Vertical |