RTP Rapid annealing tube furnace is designed for annealing semiconductor wafer or solar cell.Can be customized according to your needs.can choose according to the image and the table parameters in detail, then contact us to get the price.
|Limiting temperature||1200℃(max up to 1700)|
|Structure||Split and Rail Chamber|
|Temperature Control Accuracy||±1°C|
|Constant hot zone length||50mm (±2°C) ; 80mm (±3°C)|
|Tube Material||Quartz Tube|
|Heating Element||IR Lamps|
|Temperature Control||PID automatic control via SCR power control|
|Heating curves||30 steps programmable|
|Chamber material||Alumina Fiber|
|Warranty||One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)|
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